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Errors in measuring the linear sizes of structures when detecting backscattered electrons in an SEM. (English. Russian original) Zbl 1236.82153

Bull. Russ. Acad. Sci., Phys. 74, No. 7, 988-990 (2010); translation from Izv. Ross. Akad. Nauk, Ser. Fiz. 74, No. 7, 1029-1031 (2010).
Summary: The determining of element width and the localization of the edge of nanostructures from the intensity of a backscattered electron signal using nonreference measurement methods is discussed.

MSC:

82D80 Statistical mechanics of nanostructures and nanoparticles
78A55 Technical applications of optics and electromagnetic theory
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References:

[1] Kaz’miruk, V.V., Savitskaya, T.N., Stepanov, I.S., and Firsova, A.A., Izv. Akad. Nauk SSSR, Ser. Fiz., 1990, vol. 54, p. 227.
[2] Kozlitin, A.I. and Nikitin, A.V., Izv. Akad. Nauk, Ser. Fiz., 1993, vol. 57, no. 9, p. 17.
[3] Kanaya, K. and Okayama, S., J. Phys. D: Appl. Phys., 1972, vol. 5, p. 43. · doi:10.1088/0022-3727/5/1/308
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