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Finite element solution of a nonlinear diffusion problem with a moving boundary. (English) Zbl 0605.65078
The above problem is a boundary-value problem simulating the redistribution of impurities in semiconductor device structures. The problem is formulated in a variational form. A fully discrete finite element solution is constructed. It is based on triangular elements varying in time. Stability of the scheme is proved and an error estimate derived. Some numerical results are introduced.

65N30 Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs
65N15 Error bounds for boundary value problems involving PDEs
35R35 Free boundary problems for PDEs
35K60 Nonlinear initial, boundary and initial-boundary value problems for linear parabolic equations
78A55 Technical applications of optics and electromagnetic theory
Full Text: DOI EuDML
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