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The MEMS handbook. (English) Zbl 1060.74001
CRC Mechanical Engineering Series. Boca Raton, FL: CRC Press (ISBN 0-8493-0077-0/hbk). 928 p. (2002).
This fundamental handbook is devoted to various aspects of microelectromechanical systems (MEMS) and to electromechanical miniaturization. MEMS design, fabrication and applications together with physical modeling of the corresponding materials, transport phenomena and operations are discussed. The material includes also electrical, structural, fluidic, transport and distributed control problems for MEMS.
The book is divided into four parts. Part I presents background and physical considerations, Part II discusses the design and fabrication of microdevices, Part III reviews applications of microsensors and microactuators, and the final part IV dicusses the future perspectives of the field. The 36 chapters are written by the world’s foremost authorities on this mutidisciplinary subject. The vast material is clearly divided, and a detailed general index at the end of the book allows to find quickly the desired topic. Additionally, numerous color plates contribute to the best understanding of the material presented.
Undoubtedly, this MEMS handbook should be indispensable as a reference book to experts in the field, or as a primer to graduate students getting started in the progressively developing area of electromechanical miniaturization.

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