an:07196790
Zbl 1442.74113
Gao, Wenjun; Wang, Fengwen; Sigmund, Ole
Systematic design of high-\(Q\) prestressed micro membrane resonators
EN
Comput. Methods Appl. Mech. Eng. 361, Article ID 112692, 17 p. (2020).
00448853
2020
j
74K15 74P15
topology optimization; prestressed membranes; resonators; quality factor; frequency-quality factor
Summary: Quality factor \((Q)\) and frequency-quality factor \(Qf\) of prestressed membrane resonators are enhanced by topology optimization. The optimization targets the fundamental mode which is more easily identified in physical experiments compared to high-order modes embedded in possibly dense frequency ranges. Both intrinsic and extrinsic losses are considered in the optimization process. With different combinations of the two damping sources, topology optimization yields distinct designs, which reveals that damping mechanisms significantly affect the optimal geometry of micro resonators. For optimized designs, the \(Qf\) in the fundamental mode exceeds the minimum requirement for room-temperature quantum optomechanics \((6.2 \times 10^{12}\,\mathrm{Hz}\) and reaches \(10^{13}\,\mathrm{Hz}\) in numerical experiments.